제품소개

Valves

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LL GATE VALVE – MT SERIES (Horizontal type)

  • Application field

    Dry etcher / CVD / Sputter / ELA / Plasma asher / Encapsulation system Evaporator / Etc. vacuum system

  • Features

    • - Standard ATM-VAC sealed valve
    • - Particle free
    • - Easy maintenance
    • - Pneumatic actuator with position sensor

Specifications

NO ITEM SPECIFICATIONS
1 Leak rate O-Ring Type : ≤ 1X10-7 mbar · ℓ/s
2 Air pressure Filtered(5㎛), CDA 5-6 bar
3 Differential pressure at opening ≤ 5 mbar
4 Cycle unit first service ≥ 1 million (unheated, vacuum, clean room)
5 Operating temperature
Seal plate / Actuator / Control unit ≤ 150℃ / ≤ 80℃ / ≤ 50℃
6 Seal material Viton, Customer option
7 Body materials Aluminum / SUS etc.
8 Tact time 5~6sec / cycle
9 Applications GEN2-GEN11
10 Options Seal material / Glass crack sensor / Fast tact time